• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to a baking device (10) for a wafer (14) coated with a coating (15) containing a solvent, the baking device comprising a baking chamber (16), a carrier (12) for the wafer (14) An inlet (30) for a purge gas and a purge gas outlet (40) loaded with solvent evaporated from the coating (15). The inlet is formed as a diffusion member (30) disposed over the wafer (14) to uniformly introduce the purge gas over substantially the entire surface of the wafer (14), and the exit is formed as a discharge ring (40) the diffusion element (30) radially surrounds and is arranged on a ceiling (22) of the baking chamber (16).
    公开号:AT516575A2
    申请号:T50893/2015
    申请日:2015-10-20
    公开日:2016-06-15
    发明作者:
    申请人:Suss Microtec Lithography Gmbh；
    IPC主号:
    专利说明:

    The invention relates to a baking apparatus for a wafer which is coated with a coating containing a solvent, comprising a baking chamber, a carrier for the wafer, an inlet for a purge gas and a discharge for the purge gas, which is loaded with solvent evaporated from the coating ,
    In processes for fabricating microstructured devices, such as semiconductor chips, one of the first steps is to coat a wafer with a solvent-containing coating (in some applications a photoresist). This can be done by spin coating, spray coating or other coating methods.
    After the coating step, the wafer with the coating is prebaked (softbaked) to remove excess solvent from the coating. For example, the wafer may be exposed to temperatures of 90 to 100 ° C for 30 to 60 seconds while it is on a heated carrier. If desired, the pressure in the chamber where pre-bake takes place may be reduced slightly below atmospheric pressure. During the softbake step, solvent evaporates from the coating. The solvent must be removed from the prebake chamber otherwise it could condense in the chamber. This could cause a drop of solvent to fall onto the wafer surface, which could affect the uniformity of the coating or even result in damage to a three-dimensional structure provided on the wafer.
    However, it is not enough simply to remove the solvent from the chamber in such a way that condensation is avoided. It is also essential that the concentration of the solvent directly over the wafer is as uniform as possible, since the amount of solvent present there has an effect on the evaporation rate of the solvent. A gradient in solvent concentration along the surface of the wafer directly above its surface would therefore result in local variations in the thickness of the coating after the softbake step.
    It is known from the prior art to establish in the baking chamber a flow with a purge gas (typically air or N2) which should mix with the solvent and guide it to a discharge port. However, the prior art devices have certain deficiencies in producing a uniform concentration of the evaporated solvent over the wafer.
    The baking process can of course also be carried out over a longer period of time and / or at higher temperatures, so that it would not be described as "prebake" (softbake) but as "baking".
    The object of the invention is to provide a device for baking a wafer, which is coated with a coating containing a solvent, wherein the device is ensured that the solvent is evaporated from the coating in a uniform and homogeneous manner and have problems with the condensation of the Solvent can be avoided.
    In order to achieve this object, the invention provides a baking apparatus of the above-mentioned type in which the inlet is formed as a diffusion element disposed above the wafer, so that the purge gas is introduced uniformly over substantially the entire surface of the wafer, wherein the discharge as Ausleitungsring is formed, which surrounds the diffusion element radially and is arranged on a ceiling of the baking chamber. The invention is based on the principle to introduce the purge gas into the chamber on the same side on which it is also discharged, namely on the top of the chamber. Thus, a purge gas flow is produced, which is initially directed overall downward and radially outward and then upwards to the discharge. A first advantage of this purge gas flow is that it enables a uniform solvent concentration to be established near the surface of the wafer. A second advantage is that the solvent laden purge gas is discharged at a distance from the outer walls of the chamber, so that there is no risk of condensation. In addition, the concentration of solvent in the blanket over the wafer is minimal, since fresh purge gas is introduced there, thereby avoiding problems with condensing the solvent.
    According to a preferred embodiment, the diffusion element has a large number of inlet openings distributed over the surface of the diffusion element. This ensures that the purge gas is introduced into the chamber in a homogeneous manner.
    The diffusion element may be a sintered plate having a defined gas porosity. Such a plate has a uniform permeability to the purge gas, so that a uniform purge gas flow into the chamber can be made.
    The diffusion element may also be a plate in which the inlet openings are formed by etching, laser drilling or mechanical drilling. Such a plate may be formed of sheet metal, and the inlet openings may be arranged in a desired pattern and / or have a predefined cross-section, so that the purge gas flow into the chamber can be made in the desired manner.
    According to a preferred embodiment, a distribution chamber is provided behind the diffusion element. The distribution chamber forms a volume in which the pressure of purge gas supplied by a purge gas source equalizes to produce a homogeneous purge gas flow through the diffusion element. "Behind" here refers to the side facing away from the wafer carrier side of the diffusion element.
    Preferably, the bleed ring is disposed radially outward of the wafer, thereby ensuring that the sweep gas flows radially across the entire wafer before it is exhausted from the ceiling of the chamber.
    The diameter of the discharge ring may be approximately equal to the diameter of the wafer carrier. This results in a compact design.
    According to a preferred embodiment, an annular discharge channel is formed behind the discharge ring. The bleed passage serves to establish a low pressure behind the bleed ring which is uniform over the entire circumference of the bleed ring, thereby ensuring that the bleed rate of the solvent laden sweep gas is uniform along the periphery of the wafer carrier. "Behind" here refers to the remote from the wafer carrier side of the discharge ring.
    Preferably, a discharge system connects the discharge passage to an exhaust system, the discharge system comprising a plurality of discharge passages connected to the discharge passage at evenly distributed points. The term "discharge" here refers to a system which transports the solvent-laden purge gas from the discharge channel to the exhaust system and includes the hoses, channels and possibly a pump.
    By connecting the exhaust system to the discharge channel at a plurality of points, it is ensured that the maximum length of a flow path in the discharge channel towards the nearest discharge channel is comparatively low, thus preventing along the flow path from a certain opening in the discharge ring in the direction of nearest discharge channel a pressure gradient arises.
    According to one embodiment of the invention, an additional purge gas entry into the baking chamber is provided along the periphery of the wafer carrier. The additional inlet for purge gas creates a "curtain" of purge gas between the purge gas loaded with solvent from the coating on the one hand and the walls of the chamber on the other hand, thereby preventing solvent from condensing on the walls.
    If the risk of solvent condensing on a surface of the baking chamber is to be further reduced, it is possible to provide a heating system for at least one of the surfaces of the baking chamber. Such a heater is in particular for
    Heating the purge ring is beneficial because it is exposed to the highest concentration of solvent in the baking chamber and thus has the highest risk of condensing the solvent.
    To accelerate the evaporation of the solvent from the coating, a heating system can be integrated in the wafer carrier.
    The invention will now be described with reference to an embodiment shown in the accompanying drawings. In the drawings: FIG. 1 shows, in a schematic cross section, a baking device according to the invention; - Figure 2 is a perspective, sectional schematic view of the baking chamber of the baking device of Figure 1; - Figure 3 is a schematic representation of the flow of purge gas and solvent in the baking chamber of the baking apparatus of Figure 1; and Figure 4 is a schematic, perspective view of a ceiling element of the baking device of Figure 1.
    FIG. 1 shows a baking device 10, which has a carrier 12 for a wafer 14. The wafer may be a semiconductor wafer and is provided with a thin coating 15 containing a solvent. For a better understanding, the coating 15 containing a solvent is referred to hereinafter as a photoresist or "resist", even if the baking device 10 can also be used for baking other coatings.
    The carrier 12 is arranged in a baking chamber 16, which is bounded by a bottom 18, side walls 20 and a ceiling 22. A heater 24 is integrated in the carrier 12, so that a wafer arranged on the carrier 12 can be uniformly heated.
    Optionally, an additional heater 25 is associated with the side walls 20.
    The baking apparatus 10 generally has the purpose of vaporizing a portion of the solvent contained in the resist after it has been applied to the surface of the wafer. By removing a portion of the solvent, the viscosity of the resist is increased from values suitable for depositing the resist on the wafer to levels which are preferred for subsequent processing.
    In order to achieve a uniform, homogeneous state of the resist after baking, it is essential that the evaporation rate of the solvent over the entire
    Surface of the wafer is homogeneous. Otherwise, the concentration of the solvent in the resist and thus also the properties of the resist would vary.
    The solvent evaporated from the resist 15 is removed from the chamber 16 by means of a purge gas (typically air or N 2) which is introduced into the baking chamber 16, mixes with the vaporized solvent, and then is discharged from the chamber 16.
    For introducing the flushing gas, an inlet is provided which comprises a diffusion element 30 arranged on the ceiling 22 of the baking chamber 16. In view of the fact that wafers 14 are normally disk-shaped, the diffusion element 30 has a circular shape and is arranged concentrically with the carrier 12.
    The purpose of the diffusion element 30 is to introduce the purge gas uniformly distributed as a homogeneous stream from the ceiling into the baking chamber 16. For this purpose, the diffusion element 30 is formed as a plate, which is provided with a large number of (not visible in the figures) inlet openings, each having a small cross-section.
    The diffusion element 30 may be formed as a metal plate, in which the inlet openings are introduced by laser drilling, mechanical drilling or etching. Alternatively, it is possible to form the diffusion member 30 as a sintered plate having a defined porosity for gas, so that the purge gas flows through the cavities remaining after the sintering process. Above the diffusion element 30 (or viewed from the support "behind" the diffusion element), a distribution chamber 32 is formed, which is supplied by a purge gas supply 34 with the purge gas. The purge gas supply 34 introduces the purge gas at a controlled pressure into the distribution chamber 32, in which the purge gas produces a homogeneous pressure so that it flows homogeneously through the diffusion element 30.
    Along the periphery of the wafer carrier 12, an additional inlet 36 of purge gas is provided in the baking chamber 16. The additional purge gas inlet 36 is also connected to the purge gas supply 34 and introduces purge gas in the form of an annular flow in an upward direction in the baking chamber 16 a.
    To discharge the purge gas laden with vaporized solvent, a purge system is provided which comprises a purge ring 40. The bleeder ring 40 is disposed on the ceiling 22 and extends completely around the diffusion member 30. In other words, the bleeder ring 40 is disposed radially outward of the diffusion member 30 and concentric therewith.
    The heater 25 may also communicate with the bleed ring 40 to eliminate the risk of solvent condensing there. For example, an electrical resistance heater may be disposed on the inside of the drain ring 40 to raise the temperature of the drain ring 40 to a desired level.
    As can be seen from FIG. 1, the diameter of the diffusion element 30 essentially corresponds to the diameter of the (largest) wafer 14 on the carrier 12.
    The diameter of the discharge ring 40 substantially corresponds to the diameter of the carrier 12.
    The bleed ring 40 includes a plurality of small bleed holes 41 (see Figures 2 and 3) which lead into an annular bleed passage 42 formed over the bleed ring 40. In other words, the discharge channel 42 is formed behind the discharge ring 40 on the side facing away from the carrier 12.
    As shown in Figure 2, the discharge ring 40 can be used to clamp the diffusion member 30 to the ceiling 22.
    From the discharge channel 42, the flushing gas loaded with the vaporized solvent is discharged by means of an exhaust system comprising a plurality of suction channels 44 which are connected to a discharge unit 46 which applies a slight vacuum to the suction channels 44.
    With the discharge channel 42 is to ensure that the provided by the discharge unit 46 partial vacuum evenly distributed therein, although the suction channels 44 withdraw the purge gas at separate points from the discharge channel 42. Consequently, the cross-section of the discharge channel 42 must be large enough to prevent a pressure drop in the discharge channel when the purge gas flows therein to the nearest suction channel 44.
    Homogeneous pressure in the bleed passage 42 is further assisted by connecting the bleed passages 42 to the bleed passage 42 at a plurality of points 48 (see FIG. 4), four points equally spaced along the circumference of the bleed passage. This ensures that the longest distance that the purge gas entering the purge passage 42 has to flow before it is exhausted to the exhaust ports is 45 ° along the circumference of the purge passage.
    Obviously, a larger number of suction channels 44 may be used.
    As further shown in Figure 4, which shows a plan view of a ceiling element 50, which forms the ceiling 22 of the baking chamber 16, the discharge channel 42 and the suction channels 44 are integrated into the ceiling element 50, which includes the diffusion element 30 in its center. The suction channels 44 are arranged "above" the diffusion element 30 on its side facing away from the baking chamber 16.
    The special shape of the suction channels 44 serves two purposes: On the one hand, the suction action of the discharge unit 46 is intended to dissipate into the discharge channel 42 in a homogeneous manner. For this purpose, the length of the suction channels between the points 48, where the suction channels are connected to the discharge channel 42, and the length of the connection to the discharge unit 46 must be the same. On the other hand, the connection to the discharge unit 46 may conveniently be where it is needed so that a ceiling element of prior art design can be replaced by a ceiling element 50 without requiring significant modifications to the general layout of the baking device.
    The baking device 10 described so far is operated in the following way:
    A wafer 14 provided with a coating of resist 15 is introduced into the baking chamber 16. The baking chamber 16 is closed and a baking timer is activated. The heater 24 is normally operated at a constant level.
    In addition, the purge gas supply 34 is activated, which generates a purge gas flow in the direction of the distribution chamber 32. From the distribution chamber 32, the purge gas flows evenly distributed and in a homogeneous manner down into the baking chamber 16 (see the arrows P in Figure 1 and 3).
    An additional flushing gas flow enters the baking chamber 16 via the additional flushing gas inlet 36 (see the arrows A in FIGS. 1 and 3).
    As a result of the heating of the wafer 14, a part of the solvent present in the resist 15 evaporates (see the arrows S in Figures 1 and 3). Solvent S mixes with purge gas P and is conveyed with the purge gas to the discharge ring 40 (see arrows PS in Figures 1 and 3), from where it is discharged in a homogeneous manner from the baking chamber 16.
    If desired, the pressure in the baking chamber 16 may be reduced slightly below atmospheric pressure to increase the rate at which the solvent evaporates from the resist.
    Generally speaking, a purge gas stream is produced which begins at the top 22 (ie at the top of the baking chamber 16), down to the wafer 14 where solvent is taken up, then discharged radially outwardly and then out of the baking chamber 16 via the spill ring 40 becomes.
    When the purge gas is allowed to enter the baking chamber 16 from the ceiling of the baking chamber 16 over the entire surface of the wafer 14 and further discharges the solvent laden purge gas radially outward from the wafer 14 to the ceiling 22 of the baking chamber 16, a variety results of advantages:
    The solvent concentration on the blanket 22 of the baking chamber 16 above the wafer 14 is minimal, thereby preventing solvent from condensing at a point from which it could drop as drops onto the wafer.
    The solvent concentration in the purge gas is homogeneous to a very high degree over the entire surface of the wafer 14. This is made clear by viewing a virtual volume of purge gas, which is directed, for example, centrally to the wafer 14. As it travels radially outward along the surface of the wafer, additional solvent is absorbed. At the same time, the virtual volume is "expanded" as it travels radially outward, and additional purge gas is added from the diffusion element 30, thus maintaining the solvent concentration at a constant level.
    The additional purge gas stream A acts as a barrier or curtain between the side walls 20 of the baking chamber 16 and the solvent laden purge gas, thereby preventing solvent condensing on the sidewalls.
    As far as the purge gas has a cooling effect on the wafer 14, this effect is homogeneous. This helps that the resist has a homogeneous state after baking.
    权利要求:
    Claims (12)
    [1]
    claims
    A baking apparatus (10) for a wafer (14) coated with a coating (15) containing a solvent, comprising a baking chamber (16), a carrier (12) for the wafer (14), an inlet (30) for a purge gas and a discharge (40) for the purge gas laden with solvent evaporated from the coating (15), characterized in that the inlet is formed as a diffusion element (30) overlying the wafer (14) is arranged to introduce the purge gas uniformly over substantially the entire surface of the wafer (14), and that the discharge is designed as a discharge ring (40) which radially surrounds the diffusion element (30) and on a ceiling (22) of the baking chamber ( 16) is arranged.
    [2]
    2. Apparatus according to claim 1, wherein the diffusion element (30) has a large number of inlet openings distributed over its surface.
    [3]
    The apparatus of claim 2, wherein the diffusion element (30) is a sintered plate having a defined gas porosity.
    [4]
    4. The device of claim 2, wherein the diffusion element (30) is a plate in which the inlet openings are formed by etching, laser drilling or mechanical drilling.
    [5]
    5. Device according to one of the preceding claims, wherein a distribution chamber (32) behind the diffusion element (30) is provided.
    [6]
    6. Device according to one of the preceding claims, wherein the Ausleitungsring (40) is arranged radially outwardly of the wafer (14).
    [7]
    7. Device according to one of the preceding claims, wherein the diameter of the Ausleitungsrings (40) corresponds approximately to the diameter of the wafer carrier (12).
    [8]
    8. Device according to one of the preceding claims, wherein an annular discharge channel (42) behind the discharge ring (40) is formed.
    [9]
    The apparatus of claim 8, wherein a discharge system connects the discharge channel to an exhaust system, the discharge system comprising a plurality of discharge channels (44) connected to the discharge channel (42) at evenly spaced points (48).
    [10]
    10. Device according to one of the preceding claims, wherein an additional Spülgaseintritt (36) in the baking chamber (16) along the circumference of the wafer carrier (12) is provided.
    [11]
    11. Device according to one of the preceding claims, wherein a heating system (25) for at least one of the surfaces of the baking chamber (16) is provided, in particular for heating the discharge ring (40).
    [12]
    12. Device according to one of the preceding claims, wherein a heating system (24) in the wafer carrier (12) is integrated.
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    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DE102014117228.0A|DE102014117228A1|2014-11-25|2014-11-25|Baking apparatus for a wafer coated with a coating containing a solvent|
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